Chemical Vapour Deposition An Integrated Engineering Design for Advanced Materials /

• Main Authors: Xu, Yongdong (Author), Yan, Xiu-Tian (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: London : Springer London, 2010.
• Series: Engineering Materials and Processes,
• Subjects: Engineering.; Industrial engineering.; Materials science.; Operating Procedures, Materials Treatment.; Materials Science, general.

The rapid advancement in chemical vapour deposition (CVD) technology has reached many fields of application, including thin film coating, microelectronics and communications. Chemical Vapour Deposition: An Integrated Engineering Design for Advanced Materials focuses on the application of this techno...

Table of Contents:

• to Chemical Vapour Deposition
• Physical Fundamentals of Chemical Vapour Deposition
• Chemical Vapour Deposition Systems Design
• Thermodynamics and Kinetics of Chemical Vapour Deposition
• Chemical Vapour Infiltration
• Microstructure Evolution and Process Control.