Electrical Atomic Force Microscopy for Nanoelectronics

• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Άλλοι συγγραφείς: Celano, Umberto (Επιμελητής έκδοσης, http://id.loc.gov/vocabulary/relators/edt)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Cham : Springer International Publishing : Imprint: Springer, 2019.
• Έκδοση: 1st ed. 2019.
• Σειρά: NanoScience and Technology,
• Θέματα: Spectroscopy.; Microscopy.; Materials science.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Nanoscale science.; Nanoscience.; Nanostructures.; Nanotechnology.; Spectroscopy and Microscopy.; Characterization and Evaluation of Materials.; Electronics and Microelectronics, Instrumentation.; Optical and Electronic Materials.; Nanoscale Science and Technology.

The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabricatio...