Electrical Atomic Force Microscopy for Nanoelectronics

The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabricatio...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
Άλλοι συγγραφείς: Celano, Umberto (Επιμελητής έκδοσης, http://id.loc.gov/vocabulary/relators/edt)
Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
Γλώσσα:English
Έκδοση: Cham : Springer International Publishing : Imprint: Springer, 2019.
Έκδοση:1st ed. 2019.
Σειρά:NanoScience and Technology,
Θέματα:
Διαθέσιμο Online:Full Text via HEAL-Link
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245 1 0 |a Electrical Atomic Force Microscopy for Nanoelectronics  |h [electronic resource] /  |c edited by Umberto Celano. 
250 |a 1st ed. 2019. 
264 1 |a Cham :  |b Springer International Publishing :  |b Imprint: Springer,  |c 2019. 
300 |a XX, 408 p. 256 illus., 230 illus. in color.  |b online resource. 
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490 1 |a NanoScience and Technology,  |x 1434-4904 
505 0 |a Introduction (U. Celano, W. Vandervorst) -- Conductive AFM for nanoscale analysis of high-k dielectric metal oxides (C. Rodenbücher, M. Wojtyniak, K. Szot) -- Mapping Conductance and Carrier Distribution in Confined Three-Dimensional Transistor Structures (A. Schulze, P. Eyben, K. Paredis, L. Wouters, U. Celano, W. Vandervorst) -- Scanning Capacitance Microscopy for two-dimensional carrier profiling of semiconductor devices (J. Mody, J. Nxumalo) -- Scanning probe lithography for nanopatterning and fabrication of high-resolution devices (Y. K. Ryu, A. W. Knoll) -- Characterizing Ferroelectricity with an Atomic Force Microscopy: an all-around technique (S. Martin, B. Gautier, N. Baboux, A. Gruvermann, A. Carretero-Genevrier, M. Gich, A. Gomez) -- Electrical AFM for the analysis of Resistive Switching (S. Brivio, J. Frascaroli, M. H. Lee) -- Magnetic force microscopy for magnetic recording and devices (A. Hirohata, M. Samiepour, M. Corbetta) -- Nanoscale space charge density profiling with KPFM and photoconductive C-AFM/KPFM (C. Villeneuve-Faure, K. Makasheva, L. Boudou, G. Teyssedre) -- Electrical AFM of 2D materials and heterostructures for nanoelectronics (F. Giannazzo, G. Greco, F. Roccaforte, C. Mahata, M. Lanza) -- Diamond probes technology (T. Hantschel, T. Conard, J. Kilpatrick, G. Cross) -- Scanning Microwave Impedance Microscopy (sMIM) in electronic materials and quantum materials (K. Rubin, Y. Yang, O. Amster, D. Scrymgeour, S. Misra). 
520 |a The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible. 
650 0 |a Spectroscopy. 
650 0 |a Microscopy. 
650 0 |a Materials science. 
650 0 |a Electronics. 
650 0 |a Microelectronics. 
650 0 |a Optical materials. 
650 0 |a Electronic materials. 
650 0 |a Nanoscale science. 
650 0 |a Nanoscience. 
650 0 |a Nanostructures. 
650 0 |a Nanotechnology. 
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650 2 4 |a Characterization and Evaluation of Materials.  |0 http://scigraph.springernature.com/things/product-market-codes/Z17000 
650 2 4 |a Electronics and Microelectronics, Instrumentation.  |0 http://scigraph.springernature.com/things/product-market-codes/T24027 
650 2 4 |a Optical and Electronic Materials.  |0 http://scigraph.springernature.com/things/product-market-codes/Z12000 
650 2 4 |a Nanoscale Science and Technology.  |0 http://scigraph.springernature.com/things/product-market-codes/P25140 
650 2 4 |a Nanotechnology.  |0 http://scigraph.springernature.com/things/product-market-codes/Z14000 
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