Electrical Atomic Force Microscopy for Nanoelectronics

• Corporate Author: SpringerLink (Online service)
• Other Authors: Celano, Umberto (Editor, http://id.loc.gov/vocabulary/relators/edt)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2019.
• Edition: 1st ed. 2019.
• Series: NanoScience and Technology,
• Subjects: Spectroscopy.; Microscopy.; Materials science.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Nanoscale science.; Nanoscience.; Nanostructures.; Nanotechnology.; Spectroscopy and Microscopy.; Characterization and Evaluation of Materials.; Electronics and Microelectronics, Instrumentation.; Optical and Electronic Materials.; Nanoscale Science and Technology.

The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabricatio...