Electrical Atomic Force Microscopy for Nanoelectronics

• Corporate Author: SpringerLink (Online service)
• Other Authors: Celano, Umberto (Editor, http://id.loc.gov/vocabulary/relators/edt)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2019.
• Edition: 1st ed. 2019.
• Series: NanoScience and Technology,
• Subjects: Spectroscopy.; Microscopy.; Materials science.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Nanoscale science.; Nanoscience.; Nanostructures.; Nanotechnology.; Spectroscopy and Microscopy.; Characterization and Evaluation of Materials.; Electronics and Microelectronics, Instrumentation.; Optical and Electronic Materials.; Nanoscale Science and Technology.

The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabricatio...

Table of Contents:

• Introduction (U. Celano, W. Vandervorst)
• Conductive AFM for nanoscale analysis of high-k dielectric metal oxides (C. Rodenbücher, M. Wojtyniak, K. Szot)
• Mapping Conductance and Carrier Distribution in Confined Three-Dimensional Transistor Structures (A. Schulze, P. Eyben, K. Paredis, L. Wouters, U. Celano, W. Vandervorst)
• Scanning Capacitance Microscopy for two-dimensional carrier profiling of semiconductor devices (J. Mody, J. Nxumalo)
• Scanning probe lithography for nanopatterning and fabrication of high-resolution devices (Y. K. Ryu, A. W. Knoll)
• Characterizing Ferroelectricity with an Atomic Force Microscopy: an all-around technique (S. Martin, B. Gautier, N. Baboux, A. Gruvermann, A. Carretero-Genevrier, M. Gich, A. Gomez)
• Electrical AFM for the analysis of Resistive Switching (S. Brivio, J. Frascaroli, M. H. Lee)
• Magnetic force microscopy for magnetic recording and devices (A. Hirohata, M. Samiepour, M. Corbetta)
• Nanoscale space charge density profiling with KPFM and photoconductive C-AFM/KPFM (C. Villeneuve-Faure, K. Makasheva, L. Boudou, G. Teyssedre)
• Electrical AFM of 2D materials and heterostructures for nanoelectronics (F. Giannazzo, G. Greco, F. Roccaforte, C. Mahata, M. Lanza)
• Diamond probes technology (T. Hantschel, T. Conard, J. Kilpatrick, G. Cross)
• Scanning Microwave Impedance Microscopy (sMIM) in electronic materials and quantum materials (K. Rubin, Y. Yang, O. Amster, D. Scrymgeour, S. Misra).