Mechanical Properties of Silicon Based Compounds: Silicides

• Main Author: Pelleg, Joshua (Author, http://id.loc.gov/vocabulary/relators/aut)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2019.
• Edition: 1st ed. 2019.
• Series: Engineering Materials,
• Subjects: Materials science.; Engineering-Materials.; Structural materials.; Characterization and Evaluation of Materials.; Materials Engineering.; Structural Materials.

This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocatio...