Mechanical Properties of Silicon Based Compounds: Silicides

• Κύριος συγγραφέας: Pelleg, Joshua (Συγγραφέας, http://id.loc.gov/vocabulary/relators/aut)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Cham : Springer International Publishing : Imprint: Springer, 2019.
• Έκδοση: 1st ed. 2019.
• Σειρά: Engineering Materials,
• Θέματα: Materials science.; Engineering-Materials.; Structural materials.; Characterization and Evaluation of Materials.; Materials Engineering.; Structural Materials.
• Φυσική περιγραφή: XVI, 272 p. 315 illus., 12 illus. in color. online resource.
• ISBN: 9783030225988
• ISSN: 1612-1317
• DOI: 10.1007/978-3-030-22598-8

This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.