Mechanical Properties of Silicon Based Compounds: Silicides
This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocatio...
Κύριος συγγραφέας: | Pelleg, Joshua (Συγγραφέας, http://id.loc.gov/vocabulary/relators/aut) |
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Συγγραφή απο Οργανισμό/Αρχή: | SpringerLink (Online service) |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Cham :
Springer International Publishing : Imprint: Springer,
2019.
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Έκδοση: | 1st ed. 2019. |
Σειρά: | Engineering Materials,
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Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
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