|
|
|
|
LEADER |
03999nam a2200637 4500 |
001 |
978-3-030-23299-3 |
003 |
DE-He213 |
005 |
20191220130855.0 |
007 |
cr nn 008mamaa |
008 |
190727s2019 gw | s |||| 0|eng d |
020 |
|
|
|a 9783030232993
|9 978-3-030-23299-3
|
024 |
7 |
|
|a 10.1007/978-3-030-23299-3
|2 doi
|
040 |
|
|
|d GrThAP
|
050 |
|
4 |
|a QC610.9-611.8
|
072 |
|
7 |
|a TJFD5
|2 bicssc
|
072 |
|
7 |
|a TEC008090
|2 bisacsh
|
072 |
|
7 |
|a TJFD
|2 thema
|
082 |
0 |
4 |
|a 537.622
|2 23
|
100 |
1 |
|
|a Rebohle, Lars.
|e author.
|4 aut
|4 http://id.loc.gov/vocabulary/relators/aut
|
245 |
1 |
0 |
|a Flash Lamp Annealing
|h [electronic resource] :
|b From Basics to Applications /
|c by Lars Rebohle, Slawomir Prucnal, Denise Reichel.
|
250 |
|
|
|a 1st ed. 2019.
|
264 |
|
1 |
|a Cham :
|b Springer International Publishing :
|b Imprint: Springer,
|c 2019.
|
300 |
|
|
|a XVIII, 288 p.
|b online resource.
|
336 |
|
|
|a text
|b txt
|2 rdacontent
|
337 |
|
|
|a computer
|b c
|2 rdamedia
|
338 |
|
|
|a online resource
|b cr
|2 rdacarrier
|
347 |
|
|
|a text file
|b PDF
|2 rda
|
490 |
1 |
|
|a Springer Series in Materials Science,
|x 0933-033X ;
|v 288
|
505 |
0 |
|
|a Introduction -- Technological background -- Basic components -- Flash lamps -- Process management and process control -- FLA assisted deposition -- Temperature -- Thermal budget -- Temperature measurements -- Temperature simulations -- FLA for semiconductors -- Defect engineering -- Doping -- Crystallization -- Semiconductor nanostructures -- Beyond semiconductors -- Transparent conducting oxides -- Metallic films -- High-k materials and dielectrics -- Flexible substrates -- Outlook.
|
520 |
|
|
|a This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reader to properly plan and perform their own thermal processing. Moreover, this books gives a broad overview of the applications of flash lamp annealing, including a comprehensive literature survey. Several case studies of simulated temperature profiles in real material systems give the reader the necessary insight into the underlying physics and simulations. This book is a valuable reference work for both novice and advanced users.
|
650 |
|
0 |
|a Semiconductors.
|
650 |
|
0 |
|a Optical materials.
|
650 |
|
0 |
|a Electronic materials.
|
650 |
|
0 |
|a Manufactures.
|
650 |
|
0 |
|a Lasers.
|
650 |
|
0 |
|a Photonics.
|
650 |
|
0 |
|a Microwaves.
|
650 |
|
0 |
|a Optical engineering.
|
650 |
|
0 |
|a Nanotechnology.
|
650 |
1 |
4 |
|a Semiconductors.
|0 http://scigraph.springernature.com/things/product-market-codes/P25150
|
650 |
2 |
4 |
|a Optical and Electronic Materials.
|0 http://scigraph.springernature.com/things/product-market-codes/Z12000
|
650 |
2 |
4 |
|a Manufacturing, Machines, Tools, Processes.
|0 http://scigraph.springernature.com/things/product-market-codes/T22050
|
650 |
2 |
4 |
|a Optics, Lasers, Photonics, Optical Devices.
|0 http://scigraph.springernature.com/things/product-market-codes/P31030
|
650 |
2 |
4 |
|a Microwaves, RF and Optical Engineering.
|0 http://scigraph.springernature.com/things/product-market-codes/T24019
|
650 |
2 |
4 |
|a Nanotechnology and Microengineering.
|0 http://scigraph.springernature.com/things/product-market-codes/T18000
|
700 |
1 |
|
|a Prucnal, Slawomir.
|e author.
|4 aut
|4 http://id.loc.gov/vocabulary/relators/aut
|
700 |
1 |
|
|a Reichel, Denise.
|e author.
|4 aut
|4 http://id.loc.gov/vocabulary/relators/aut
|
710 |
2 |
|
|a SpringerLink (Online service)
|
773 |
0 |
|
|t Springer eBooks
|
776 |
0 |
8 |
|i Printed edition:
|z 9783030232986
|
776 |
0 |
8 |
|i Printed edition:
|z 9783030233006
|
776 |
0 |
8 |
|i Printed edition:
|z 9783030233013
|
830 |
|
0 |
|a Springer Series in Materials Science,
|x 0933-033X ;
|v 288
|
856 |
4 |
0 |
|u https://doi.org/10.1007/978-3-030-23299-3
|z Full Text via HEAL-Link
|
912 |
|
|
|a ZDB-2-PHA
|
950 |
|
|
|a Physics and Astronomy (Springer-11651)
|