Flash Lamp Annealing From Basics to Applications /
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reade...
Κύριοι συγγραφείς: | Rebohle, Lars (Συγγραφέας, http://id.loc.gov/vocabulary/relators/aut), Prucnal, Slawomir (http://id.loc.gov/vocabulary/relators/aut), Reichel, Denise (http://id.loc.gov/vocabulary/relators/aut) |
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Συγγραφή απο Οργανισμό/Αρχή: | SpringerLink (Online service) |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Cham :
Springer International Publishing : Imprint: Springer,
2019.
|
Έκδοση: | 1st ed. 2019. |
Σειρά: | Springer Series in Materials Science,
288 |
Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
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