Flash Lamp Annealing From Basics to Applications /

• Main Authors: Rebohle, Lars (Author, http://id.loc.gov/vocabulary/relators/aut), Prucnal, Slawomir (http://id.loc.gov/vocabulary/relators/aut), Reichel, Denise (http://id.loc.gov/vocabulary/relators/aut)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2019.
• Edition: 1st ed. 2019.
• Series: Springer Series in Materials Science, 288
• Subjects: Semiconductors.; Optical materials.; Electronic materials.; Manufactures.; Lasers.; Photonics.; Microwaves.; Optical engineering.; Nanotechnology.; Optical and Electronic Materials.; Manufacturing, Machines, Tools, Processes.; Optics, Lasers, Photonics, Optical Devices.; Microwaves, RF and Optical Engineering.; Nanotechnology and Microengineering.

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reade...

Table of Contents:

• Introduction
• Technological background
• Basic components
• Flash lamps
• Process management and process control
• FLA assisted deposition
• Temperature
• Thermal budget
• Temperature measurements
• Temperature simulations
• FLA for semiconductors
• Defect engineering
• Doping
• Crystallization
• Semiconductor nanostructures
• Beyond semiconductors
• Transparent conducting oxides
• Metallic films
• High-k materials and dielectrics
• Flexible substrates
• Outlook.