Flash Lamp Annealing From Basics to Applications /
This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reade...
Κύριοι συγγραφείς: | , , |
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Συγγραφή απο Οργανισμό/Αρχή: | |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Cham :
Springer International Publishing : Imprint: Springer,
2019.
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Έκδοση: | 1st ed. 2019. |
Σειρά: | Springer Series in Materials Science,
288 |
Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Introduction
- Technological background
- Basic components
- Flash lamps
- Process management and process control
- FLA assisted deposition
- Temperature
- Thermal budget
- Temperature measurements
- Temperature simulations
- FLA for semiconductors
- Defect engineering
- Doping
- Crystallization
- Semiconductor nanostructures
- Beyond semiconductors
- Transparent conducting oxides
- Metallic films
- High-k materials and dielectrics
- Flexible substrates
- Outlook.