A Practical Guide to Surface Metrology

This book offers a genuinely practical introduction to the most commonly encountered optical and non-optical systems used for the metrology and characterization of surfaces, including guidance on best practice, calibration, advantages and disadvantages, and interpretation of results. It enables the...

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Bibliographic Details
Main Author: Quinten, Michael (Author, http://id.loc.gov/vocabulary/relators/aut)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: Cham : Springer International Publishing : Imprint: Springer, 2019.
Edition:1st ed. 2019.
Series:Springer Series in Measurement Science and Technology,
Subjects:
Online Access:Full Text via HEAL-Link
Table of Contents:
  • Preface
  • Introduction to Surfaces and Surface Metrology
  • Tactile Surface Metrology
  • Capacitive And Inductive Surface Metrology
  • Optical Surface Metrology- Physical Basics
  • Optical Surface Metrology - Methods
  • Imaging Methods - Multisensor - Systems - A Versatile Approach To Surface Metrology
  • Appendix
  • Index.