Ion Beams in Materials Processing and Analysis

• Main Authors: Schmidt, Bernd (Author), Wetzig, Klaus (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Vienna : Springer Vienna : Imprint: Springer, 2013.
• Subjects: Materials science.; Atoms.; Physics.; Surfaces (Physics).; Interfaces (Physical sciences).; Thin films.; Materials > Surfaces.; Materials Science.; Surfaces and Interfaces, Thin Films.; Atomic, Molecular, Optical and Plasma Physics.; Surface and Interface Science, Thin Films.

A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning is treated in detail. Its applications in m...