Ion Beams in Materials Processing and Analysis

• Κύριοι συγγραφείς: Schmidt, Bernd (Συγγραφέας), Wetzig, Klaus (Συγγραφέας)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Vienna : Springer Vienna : Imprint: Springer, 2013.
• Θέματα: Materials science.; Atoms.; Physics.; Surfaces (Physics).; Interfaces (Physical sciences).; Thin films.; Materials > Surfaces.; Materials Science.; Surfaces and Interfaces, Thin Films.; Atomic, Molecular, Optical and Plasma Physics.; Surface and Interface Science, Thin Films.

A comprehensive review of ion beam application in modern materials research is provided, including the basics of ion beam physics and technology. The physics of ion-solid interactions for ion implantation, ion beam synthesis, sputtering and nano-patterning is treated in detail. Its applications in m...

Πίνακας περιεχομένων:

• Preface
• 1. Introduction
• 2. Ion- Solid Interactions
• 2.1 Fundamental Principles
• 2.2 Binary Elastic Collisions
• 2.3 Ion Stopping
• 2.4 Ion Channeling
• 2.5 Ion Induced Target Modifications
• 3. Ion Beam Technology
• 3.1 Principles of Ion Accelerators
• 3.2 Ion Sources
• 3.3 Ion Acceleration
• 3.4 Ion Beam Handling
• 3.5 Ion Implantation Systems
• 3.6 Electrostatic Ion Accelerator Systems
• 3.7 Focused Ion Beam Systems
• 4. Materials Processing
• 4.1 Ion Irradiation Effects in Crystalline Materials
• 4.2 Ion Implantation into Semiconductors
• 4.3 Ion Beam Synthesis of New Phases in Solids
• 4.4 Ion Beam Mixing of Interfaces
• 4.5 Ion Beam Slicing of Thin Layers (Smart-Cut for SOI and Solar Cells)
• 4.6 Ion Beam Erosion, Sputtering and Surface Patterning (Ripples and Dots)
• 4.7 Ion Beam Shaping of Nanomaterials
• 4.8 Ion Beam Processing of other Materials
• 5. Ion Beam Preparation of Materials
• 5.1 Removal of Target Atoms by Sputtering
• 5.2 Effects on Sputtering Yield
• 5.3 Preparation Steps by Ion Beam Irradiation
• 5.4 Focus Ion Beam (FIB) Preparation
• 6. Ion Beam Analysis by Ion Beams
• 6.1 Introduction
• 6.2 Ion Beam Analytical Techniques – a Survey
• 6.3 Ion Beam Scattering Techniques
• 6.4 Ion Beam Induced Photon Emission
• 6.5 Nuclear Reaction Analysis (NRA)
• 6.6 Ion Beam Induced Electron and Light Emission
• 6.7 Secondary Ion Emission
• 6.8 Ion Beam Imaging Techniques
• 7. Special Ion Beam Applications in Materials Analysis Problems
• 7.1 Functional Thin Films and Layers
• 7.2 Ion Beam Analysis in Art and Archeometry
• 7.3 Special Applications in Life Sciences
• Index.