Design, Modeling and Control of Nanopositioning Systems

• Κύριοι συγγραφείς: Fleming, Andrew J. (Συγγραφέας), Leang, Kam K. (Συγγραφέας)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Cham : Springer International Publishing : Imprint: Springer, 2014.
• Σειρά: Advances in Industrial Control,
• Θέματα: Engineering.; Control engineering.; Mechatronics.; Industrial engineering.; Production engineering.; Manufacturing industries.; Machines.; Tools.; Control.; Manufacturing, Machines, Tools.; Industrial and Production Engineering.

Covering the complete design cycle of nanopositioning systems, this is the first comprehensive text on the topic. The book first introduces concepts associated with nanopositioning stages and outlines their application in such tasks as scanning probe microscopy, nanofabrication, data storage, cell s...