Nanopositioning Technologies Fundamentals and Applications /

• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Άλλοι συγγραφείς: Ru, Changhai (Επιμελητής έκδοσης), Liu, Xinyu (Επιμελητής έκδοσης), Sun, Yu (Επιμελητής έκδοσης)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Cham : Springer International Publishing : Imprint: Springer, 2016.
• Έκδοση: 1st ed. 2016.
• Θέματα: Engineering.; Engineering design.; Nanotechnology.; Control engineering.; Robotics.; Mechatronics.; Electronics.; Microelectronics.; Nanotechnology and Microengineering.; Electronics and Microelectronics, Instrumentation.; Control, Robotics, Mechatronics.; Engineering Design.
• Φυσική περιγραφή: VI, 409 p. 279 illus., 203 illus. in color. online resource.
• ISBN: 9783319238531

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.