Nanopositioning Technologies Fundamentals and Applications /

• Corporate Author: SpringerLink (Online service)
• Other Authors: Ru, Changhai (Editor), Liu, Xinyu (Editor), Sun, Yu (Editor)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2016.
• Edition: 1st ed. 2016.
• Subjects: Engineering.; Engineering design.; Nanotechnology.; Control engineering.; Robotics.; Mechatronics.; Electronics.; Microelectronics.; Nanotechnology and Microengineering.; Electronics and Microelectronics, Instrumentation.; Control, Robotics, Mechatronics.; Engineering Design.
• Physical Description: VI, 409 p. 279 illus., 203 illus. in color. online resource.
• ISBN: 9783319238531

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies, and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.