Piezoelectric MEMS Resonators

• Corporate Author: SpringerLink (Online service)
• Other Authors: Bhugra, Harmeet (Editor), Piazza, Gianluca (Editor)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2017.
• Series: Microsystems and Nanosystems,
• Subjects: Engineering.; Nanotechnology.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Electronics and Microelectronics, Instrumentation.; Nanotechnology and Microengineering.; Optical and Electronic Materials.

This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research...