Helium Ion Microscopy

• Corporate Author: SpringerLink (Online service)
• Other Authors: Hlawacek, Gregor (Editor), Gölzhäuser, Armin (Editor)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2016.
• Series: NanoScience and Technology,
• Subjects: Physics.; Surfaces (Physics).; Interfaces (Physical sciences).; Thin films.; Spectroscopy.; Microscopy.; Nanotechnology.; Materials > Surfaces.; Spectroscopy and Microscopy.; Surfaces and Interfaces, Thin Films.; Surface and Interface Science, Thin Films.; Nanotechnology and Microengineering.

This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are di...