Dielectric Breakdown in Gigascale Electronics Time Dependent Failure Mechanisms /

• Main Authors: Borja, Juan Pablo (Author), Lu, Toh-Ming (Author), Plawsky, Joel (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2016.
• Series: SpringerBriefs in Materials,
• Subjects: Materials science.; Electronic circuits.; Nanotechnology.; Optical materials.; Electronic materials.; Materials Science.; Optical and Electronic Materials.; Nanotechnology and Microengineering.; Electronic Circuits and Devices.

This book focuses on the experimental and theoretical aspects of the time-dependent breakdown of advanced dielectric films used in gigascale electronics. Coverage includes the most important failure mechanisms for thin low-k films, new and established experimental techniques, recent advances in the...