Dielectric Breakdown in Gigascale Electronics Time Dependent Failure Mechanisms /
This book focuses on the experimental and theoretical aspects of the time-dependent breakdown of advanced dielectric films used in gigascale electronics. Coverage includes the most important failure mechanisms for thin low-k films, new and established experimental techniques, recent advances in the...
Κύριοι συγγραφείς: | , , |
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Συγγραφή απο Οργανισμό/Αρχή: | |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Cham :
Springer International Publishing : Imprint: Springer,
2016.
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Σειρά: | SpringerBriefs in Materials,
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Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Introduction
- General Theories
- Measurement Tools and Test Structures
- Experimental Techniques
- Breakdown Experiments
- Kinetics of Charge Carrier Confinement in Thin Dielectrics
- Theory of Dielectric Breakdown in Nanoporous Thin Films
- Dielectric Breakdown in Copper Interconnects
- Reconsidering Conventional Models.