Outlook and Challenges of Nano Devices, Sensors, and MEMS

• Corporate Author: SpringerLink (Online service)
• Other Authors: Li, Ting (Editor), Liu, Ziv (Editor)
• Format: Electronic eBook
• Language: English
• Published: Cham : Springer International Publishing : Imprint: Springer, 2017.
• Subjects: Engineering.; Electronic circuits.; Nanotechnology.; Circuits and Systems.; Electronic Circuits and Devices.; Nanotechnology and Microengineering.

This book provides readers with an overview of the design, fabrication, simulation, and reliability of nanoscale semiconductor devices, MEMS, and sensors, as they serve for realizing the next-generation internet of things. The authors focus on how the nanoscale structures interact with the electrica...