Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-asse...
Κύριοι συγγραφείς: | , |
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Συγγραφή απο Οργανισμό/Αρχή: | |
Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
Γλώσσα: | English |
Έκδοση: |
Cham :
Springer International Publishing : Imprint: Springer,
2018.
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Έκδοση: | 1st ed. 2018. |
Σειρά: | NanoScience and Technology,
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Θέματα: | |
Διαθέσιμο Online: | Full Text via HEAL-Link |
Πίνακας περιεχομένων:
- Introduction
- DSAL Manufacturability
- Placement Optimization for DSAL
- Placement Optimization for MP-DSAL Compliant Layout
- Redundant Via Insertion for DSAL.