Integrated Chemical Microsensor Systems in CMOS Technology

• Main Author: Hierlemann, Andreas (Author)
• Corporate Author: SpringerLink (Online service)
• Other Authors: Baltes, H. (Editor), Fujita, Hiroyuki (Editor), Liepmann, Dorian (Editor)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005.
• Series: Microtechnology and MEMS,
• Subjects: Materials science.; Analytical chemistry.; Physical measurements.; Measurement.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Nanotechnology.; Materials > Surfaces.; Thin films.; Materials Science.; Analytical Chemistry.; Optical and Electronic Materials.; Surfaces and Interfaces, Thin Films.; Measurement Science and Instrumentation.; Electronics and Microelectronics, Instrumentation.

This book, "Integrated Chemical Microsensor Systems in CMOS Technology", provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at students, scientists and engineers who are interested in gaining an introduction to the...