Integrated Chemical Microsensor Systems in CMOS Technology

• Main Author: Hierlemann, Andreas (Author)
• Corporate Author: SpringerLink (Online service)
• Other Authors: Baltes, H. (Editor), Fujita, Hiroyuki (Editor), Liepmann, Dorian (Editor)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005.
• Series: Microtechnology and MEMS,
• Subjects: Materials science.; Analytical chemistry.; Physical measurements.; Measurement.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Nanotechnology.; Materials > Surfaces.; Thin films.; Materials Science.; Analytical Chemistry.; Optical and Electronic Materials.; Surfaces and Interfaces, Thin Films.; Measurement Science and Instrumentation.; Electronics and Microelectronics, Instrumentation.

This book, "Integrated Chemical Microsensor Systems in CMOS Technology", provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at students, scientists and engineers who are interested in gaining an introduction to the...

Table of Contents:

• Fundamentals of Chemical Sensing
• Microtechnology for Chemical Sensors
• Microfabricated Chemical Sensors
• CMOS Platform Technology for Chemical Sensors
• Outlook and Future Developments.