CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms /

• Main Authors: Li, Flora M. (Author), Nathan, Arokia (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005.
• Series: Microtechnology and Mems,
• Subjects: Materials science.; Optics.; Optoelectronics.; Plasmons (Physics).; Engineering.; Electronics.; Microelectronics.; Optical materials.; Electronic materials.; Materials Science.; Optical and Electronic Materials.; Optics, Optoelectronics, Plasmonics and Optical Devices.; Engineering, general.; Electronics and Microelectronics, Instrumentation.

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspe...