CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms /

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspe...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριοι συγγραφείς: Li, Flora M. (Συγγραφέας), Nathan, Arokia (Συγγραφέας)
Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
Γλώσσα:English
Έκδοση: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005.
Σειρά:Microtechnology and Mems,
Θέματα:
Διαθέσιμο Online:Full Text via HEAL-Link
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100 1 |a Li, Flora M.  |e author. 
245 1 0 |a CCD Image Sensors in Deep-Ultraviolet  |h [electronic resource] :  |b Degradation Behavior and Damage Mechanisms /  |c by Flora M. Li, Arokia Nathan. 
264 1 |a Berlin, Heidelberg :  |b Springer Berlin Heidelberg,  |c 2005. 
300 |a XII, 232 p. 84 illus.  |b online resource. 
336 |a text  |b txt  |2 rdacontent 
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490 1 |a Microtechnology and Mems,  |x 1615-8326 
505 0 |a Overview of CCD -- CCD Imaging in the Ultraviolet (UV) Regime -- Silicon -- Silicon Dioxide -- Si-SiO2 Interface -- General Effects of Radiation -- Effects of Radiation on CCDs -- UV-Induced Effects in Si -- UV Laser Induced Effects in SiO2 -- UV Laser Induced Effects at the Si-SiO2 Interface -- CCD Measurements at 157nm -- Design Optimizations for Future Research -- Concluding Remarks. 
520 |a As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspection of deep sub-micron features in integrated circuits. DUV-sensitive charge-coupled device (CCD) cameras are in demand for these applications. Although CCD cameras that are responsive at DUV wavelengths are now available, their long-term stability is still a major concern. This book describes the degradation mechanisms and long-term performance of CCDs in the DUV, along with new results of device performance at these wavelengths. 
650 0 |a Materials science. 
650 0 |a Optics. 
650 0 |a Optoelectronics. 
650 0 |a Plasmons (Physics). 
650 0 |a Engineering. 
650 0 |a Electronics. 
650 0 |a Microelectronics. 
650 0 |a Optical materials. 
650 0 |a Electronic materials. 
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650 2 4 |a Optics, Optoelectronics, Plasmonics and Optical Devices. 
650 2 4 |a Engineering, general. 
650 2 4 |a Electronics and Microelectronics, Instrumentation. 
700 1 |a Nathan, Arokia.  |e author. 
710 2 |a SpringerLink (Online service) 
773 0 |t Springer eBooks 
776 0 8 |i Printed edition:  |z 9783540226802 
830 0 |a Microtechnology and Mems,  |x 1615-8326 
856 4 0 |u http://dx.doi.org/10.1007/b139047  |z Full Text via HEAL-Link 
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950 |a Chemistry and Materials Science (Springer-11644)