CCD Image Sensors in Deep-Ultraviolet Degradation Behavior and Damage Mechanisms /

As the deep-ultraviolet (DUV) laser technology continues to mature, an increasing number of industrial and manufacturing applications are emerging. For example, the new generation of semiconductor inspection systems is being pushed to image at increasingly shorter DUV wavelengths to facilitate inspe...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριοι συγγραφείς: Li, Flora M. (Συγγραφέας), Nathan, Arokia (Συγγραφέας)
Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
Γλώσσα:English
Έκδοση: Berlin, Heidelberg : Springer Berlin Heidelberg, 2005.
Σειρά:Microtechnology and Mems,
Θέματα:
Διαθέσιμο Online:Full Text via HEAL-Link
Πίνακας περιεχομένων:
  • Overview of CCD
  • CCD Imaging in the Ultraviolet (UV) Regime
  • Silicon
  • Silicon Dioxide
  • Si-SiO2 Interface
  • General Effects of Radiation
  • Effects of Radiation on CCDs
  • UV-Induced Effects in Si
  • UV Laser Induced Effects in SiO2
  • UV Laser Induced Effects at the Si-SiO2 Interface
  • CCD Measurements at 157nm
  • Design Optimizations for Future Research
  • Concluding Remarks.