Low-Energy Ion Irradiation of Solid Surfaces

• Κύριος συγγραφέας: Gnaser, Hubert (Συγγραφέας, http://id.loc.gov/vocabulary/relators/aut)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 1999.
• Έκδοση: 1st ed. 1999.
• Σειρά: Springer Tracts in Modern Physics, 146
• Θέματα: Materials-Surfaces.; Thin films.; Materials science.; Atoms.; Physics.; Physical chemistry.; Surfaces and Interfaces, Thin Films.; Characterization and Evaluation of Materials.; Atomic, Molecular, Optical and Plasma Physics.; Physical Chemistry.

The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization proc...