Low-Energy Ion Irradiation of Solid Surfaces

• Main Author: Gnaser, Hubert (Author, http://id.loc.gov/vocabulary/relators/aut)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 1999.
• Edition: 1st ed. 1999.
• Series: Springer Tracts in Modern Physics, 146
• Subjects: Materials-Surfaces.; Thin films.; Materials science.; Atoms.; Physics.; Physical chemistry.; Surfaces and Interfaces, Thin Films.; Characterization and Evaluation of Materials.; Atomic, Molecular, Optical and Plasma Physics.; Physical Chemistry.
• Physical Description: VIII, 294 p. 69 illus., 9 illus. in color. online resource.
• ISBN: 9783540497738
• ISSN: 0081-3869 ;
• DOI: 10.1007/BFb0110693

The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches.