Low-Energy Ion Irradiation of Solid Surfaces

• Main Author: Gnaser, Hubert (Author, http://id.loc.gov/vocabulary/relators/aut)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 1999.
• Edition: 1st ed. 1999.
• Series: Springer Tracts in Modern Physics, 146
• Subjects: Materials-Surfaces.; Thin films.; Materials science.; Atoms.; Physics.; Physical chemistry.; Surfaces and Interfaces, Thin Films.; Characterization and Evaluation of Materials.; Atomic, Molecular, Optical and Plasma Physics.; Physical Chemistry.

The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization proc...