Advanced Gate Stacks for High-Mobility Semiconductors

• Corporate Author: SpringerLink (Online service)
• Other Authors: Dimoulas, Athanasios (Editor), Gusev, Evgeni (Editor), McIntyre, Paul C. (Editor), Heyns, Marc (Editor)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2007.
• Series: Advanced Microelectronics, 27
• Subjects: Engineering.; Electronics.; Microelectronics.; Electronics and Microelectronics, Instrumentation.

Will nanoelectronic devices continue to scale according to Moore’s law? At this moment, there is no easy answer since gate scaling is rapidly emerging as a serious roadblock for the evolution of CMOS technology. Channel engineering based on high-mobility semiconductor materials (e.g. strained Si, al...