Thermal Transport for Applications in Micro/Nanomachining

• Main Authors: Wong, Basil T. (Author), Mengüç, M. Pinar (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2008.
• Series: Microtechnology and MEMS,
• Subjects: Chemistry.; Chemical engineering.; Thermodynamics.; Engineering.; Electronics.; Microelectronics.; Nanotechnology.; Industrial Chemistry/Chemical Engineering.; Electronics and Microelectronics, Instrumentation.; Engineering, general.

With the recent advances in nanosciences, micro/nanoscale engineering applications are bound to be more common, complex and challenging. Further understanding of thermal transport down to nanometer scales will be crucial for the design and operation of new devices, which is possible only with the us...

Table of Contents:

• Transport Equations
• Modeling of Transport Equations via MC Methods
• Modeling of e-Beam Transport
• Thermal Conduction Coupled with e-Beam Transport
• Two-Temperature Model Coupled with e-Beam Transport
• Thermal Conduction with Electron Flow/Ballistic Behavior
• Parallel Computations for Two-Temperature Model
• Molecular Dynamics Simulations
• Concluding Remarks.