Laser Precision Microfabrication

• Corporate Author: SpringerLink (Online service)
• Other Authors: Sugioka, Koji (Editor), Meunier, Michel (Editor), Piqué, Alberto (Editor)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2010.
• Series: Springer Series in Materials Science, 135
• Subjects: Physics.; Lasers.; Photonics.; Nanotechnology.; Laser Technology, Photonics.

Miniaturization and high precision are rapidly becoming a requirement for many industrial processes and products. As a result, there is greater interest in the use of laser microfabrication technology to achieve these goals. This book composed of 16 chapters covers all the topics of laser precision...