Optical Measurement of Surface Topography

• Corporate Author: SpringerLink (Online service)
• Other Authors: Leach, Richard (Editor)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2011.
• Subjects: Materials science.; Physical measurements.; Measurement.; Microwaves.; Optical engineering.; Materials > Surfaces.; Thin films.; Materials Science.; Characterization and Evaluation of Materials.; Microwaves, RF and Optical Engineering.; Measurement Science and Instrumentation.; Surfaces and Interfaces, Thin Films.

The measurement and characterisation of surface topography is crucial to modern manufacturing industry. The control of areal surface structure allows a manufacturer to radically alter the functionality of a part. Examples include structuring to effect fluidics, optics, tribology, aerodynamics and bi...

Table of Contents:

• Introduction to surface texture measurement
• Some common terms and definitions
• Limitations of optical 3D sensors.- Calibration of optical surface topography measuring instruments.- Chromatic confocal microscopy
• Point autofocus instruments.- Focus variation instruments.- Phase shifting interferometry.-  Coherence scanning interferometry
• Digital holographic microscopy.- Imaging confocal microscopy.- Light scattering methods.