Rare-Earth Implanted MOS Devices for Silicon Photonics Microstructural, Electrical and Optoelectronic Properties /

• Main Authors: Rebohle, Lars (Author), Skorupa, Wolfgang (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 2010.
• Series: Springer Series in Materials Science, 142
• Subjects: Materials science.; Optical materials.; Electronic materials.; Materials Science.; Optical and Electronic Materials.

The book concentrates on the microstructural, electric and optoelectronic properties of rare-earth implanted MOS structures and their use as light emitters in potential applications. It describes the structural formation processes in the gate oxide during fabrication and under operation, how this mi...