Novel Optical Technologies for Nanofabrication

• Main Authors: Liu, Qian (Author), Duan, Xuanming (Author), Peng, Changsi (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2014.
• Series: Nanostructure Science and Technology,
• Subjects: Materials science.; Nanoscale science.; Nanoscience.; Nanostructures.; Lasers.; Photonics.; Optics.; Optoelectronics.; Plasmons (Physics).; Nanotechnology.; Optical materials.; Electronic materials.; Materials Science.; Nanotechnology and Microengineering.; Laser Technology, Photonics.; Optical and Electronic Materials.; Nanoscale Science and Technology.; Optics, Optoelectronics, Plasmonics and Optical Devices.

Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors’ groups. It focuses on new  techniques and methods as well as applications and development t...

Table of Contents:

• Introduction
• Super-resolution Laser Direct Writing and Its Applications
• Laser path-guided wrinkle structures
• Laser Micro/Nanofabrication and Applications Based on Multiphoton Process
• Laser Interference Nano-Fabrication
• Super-Resolution Patterning and Photolithography Based on Surface Plasmon Polaritons
• Mass production of large-format micro/nano-structure based optical devices.