Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments /

• Main Author: Ivanov, Alexey (Author, http://id.loc.gov/vocabulary/relators/aut)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Wiesbaden : Springer Fachmedien Wiesbaden : Imprint: Springer Vieweg, 2018.
• Edition: 1st ed. 2018.
• Subjects: Nanotechnology.; Applied mathematics.; Engineering mathematics.; Thermodynamics.; Heat engineering.; Heat transfer.; Mass transfer.; Nanotechnology and Microengineering.; Mathematical and Computational Engineering.; Engineering Thermodynamics, Heat and Mass Transfer.

Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimen...