Silicon Anodization as a Structuring Technique Literature Review, Modeling and Experiments /
Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimen...
| Κύριος συγγραφέας: | Ivanov, Alexey (Συγγραφέας, http://id.loc.gov/vocabulary/relators/aut) |
|---|---|
| Συγγραφή απο Οργανισμό/Αρχή: | SpringerLink (Online service) |
| Μορφή: | Ηλεκτρονική πηγή Ηλ. βιβλίο |
| Γλώσσα: | English |
| Έκδοση: |
Wiesbaden :
Springer Fachmedien Wiesbaden : Imprint: Springer Vieweg,
2018.
|
| Έκδοση: | 1st ed. 2018. |
| Θέματα: | |
| Διαθέσιμο Online: | Full Text via HEAL-Link |
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