Micro and Nano Fabrication Tools and Processes /

Micro and Nano Fabrication Tools and Processes /

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes...

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Bibliographic Details
Main Authors: Gatzen, Hans H. (Author), Saile, Volker (Author), Leuthold, Jürg (Author)
Corporate Author: SpringerLink (Online service)
Format: Electronic eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2015.
Subjects:
Engineering.
Nanotechnology.
Manufacturing industries.
Machines.
Tools.
Industrial engineering.
Nanotechnology and Microengineering.
Manufacturing, Machines, Tools.
Operating Procedures, Materials Treatment.
Online Access:Full Text via HEAL-Link

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ΒΚΠ - Πατρα: ALFd

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Call Number: 330.01 BAU
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ΒΚΠ - Πατρα: BSC

Holdings details from ΒΚΠ - Πατρα: BSC
Call Number: 330.01 BAU
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