|
|
|
|
| LEADER |
02513nam a22005055i 4500 |
| 001 |
978-3-662-44395-8 |
| 003 |
DE-He213 |
| 005 |
20151204161749.0 |
| 007 |
cr nn 008mamaa |
| 008 |
150102s2015 gw | s |||| 0|eng d |
| 020 |
|
|
|a 9783662443958
|9 978-3-662-44395-8
|
| 024 |
7 |
|
|a 10.1007/978-3-662-44395-8
|2 doi
|
| 040 |
|
|
|d GrThAP
|
| 050 |
|
4 |
|a T174.7
|
| 072 |
|
7 |
|a TDPB
|2 bicssc
|
| 072 |
|
7 |
|a TEC027000
|2 bisacsh
|
| 082 |
0 |
4 |
|a 620.5
|2 23
|
| 100 |
1 |
|
|a Gatzen, Hans H.
|e author.
|
| 245 |
1 |
0 |
|a Micro and Nano Fabrication
|h [electronic resource] :
|b Tools and Processes /
|c by Hans H. Gatzen, Volker Saile, Jürg Leuthold.
|
| 264 |
|
1 |
|a Berlin, Heidelberg :
|b Springer Berlin Heidelberg :
|b Imprint: Springer,
|c 2015.
|
| 300 |
|
|
|a XXVI, 519 p. 357 illus., 54 illus. in color.
|b online resource.
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a computer
|b c
|2 rdamedia
|
| 338 |
|
|
|a online resource
|b cr
|2 rdacarrier
|
| 347 |
|
|
|a text file
|b PDF
|2 rda
|
| 505 |
0 |
|
|a Introduction-MEMS, a Historical Perspective -- Vacuum Technology -- Deposition Technologies -- Etching Technologies -- Doping and Surface Modification -- Lithography -- LIGA -- Nanofabrication by Self-Assembly -- Enabling Technologies I - Wafer Planarization and Bonding -- Enabling Technologies II - Contamination Control -- Device Fabrication - An Example.
|
| 520 |
|
|
|a For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.
|
| 650 |
|
0 |
|a Engineering.
|
| 650 |
|
0 |
|a Nanotechnology.
|
| 650 |
|
0 |
|a Manufacturing industries.
|
| 650 |
|
0 |
|a Machines.
|
| 650 |
|
0 |
|a Tools.
|
| 650 |
|
0 |
|a Industrial engineering.
|
| 650 |
1 |
4 |
|a Engineering.
|
| 650 |
2 |
4 |
|a Nanotechnology and Microengineering.
|
| 650 |
2 |
4 |
|a Manufacturing, Machines, Tools.
|
| 650 |
2 |
4 |
|a Operating Procedures, Materials Treatment.
|
| 700 |
1 |
|
|a Saile, Volker.
|e author.
|
| 700 |
1 |
|
|a Leuthold, Jürg.
|e author.
|
| 710 |
2 |
|
|a SpringerLink (Online service)
|
| 773 |
0 |
|
|t Springer eBooks
|
| 776 |
0 |
8 |
|i Printed edition:
|z 9783662443941
|
| 856 |
4 |
0 |
|u http://dx.doi.org/10.1007/978-3-662-44395-8
|z Full Text via HEAL-Link
|
| 912 |
|
|
|a ZDB-2-ENG
|
| 950 |
|
|
|a Engineering (Springer-11647)
|
