Micro and Nano Fabrication Tools and Processes /

• Main Authors: Gatzen, Hans H. (Author), Saile, Volker (Author), Leuthold, Jürg (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2015.
• Subjects: Engineering.; Nanotechnology.; Manufacturing industries.; Machines.; Tools.; Industrial engineering.; Nanotechnology and Microengineering.; Manufacturing, Machines, Tools.; Operating Procedures, Materials Treatment.

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes...

Table of Contents:

• Introduction-MEMS, a Historical Perspective
• Vacuum Technology
• Deposition Technologies
• Etching Technologies
• Doping and Surface Modification
• Lithography
• LIGA
• Nanofabrication by Self-Assembly
• Enabling Technologies I - Wafer Planarization and Bonding
• Enabling Technologies II - Contamination Control
• Device Fabrication - An Example.