Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

• Κύριος συγγραφέας: Zhang, Xiao-Sheng (Συγγραφέας)
• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2016.
• Σειρά: Springer Theses, Recognizing Outstanding Ph.D. Research,
• Θέματα: Engineering.; Energy harvesting.; Biotechnology.; Nanotechnology.; Electronics.; Microelectronics.; Nanotechnology and Microengineering.; Microengineering.; Energy Harvesting.; Electronics and Microelectronics, Instrumentation.

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental...