Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental...

Πλήρης περιγραφή

Λεπτομέρειες βιβλιογραφικής εγγραφής
Κύριος συγγραφέας: Zhang, Xiao-Sheng (Συγγραφέας)
Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
Γλώσσα:English
Έκδοση: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2016.
Σειρά:Springer Theses, Recognizing Outstanding Ph.D. Research,
Θέματα:
Διαθέσιμο Online:Full Text via HEAL-Link
LEADER 02659nam a22005175i 4500
001 978-3-662-48816-4
003 DE-He213
005 20170519022345.0
007 cr nn 008mamaa
008 151201s2016 gw | s |||| 0|eng d
020 |a 9783662488164  |9 978-3-662-48816-4 
024 7 |a 10.1007/978-3-662-48816-4  |2 doi 
040 |d GrThAP 
050 4 |a T174.7 
072 7 |a TDPB  |2 bicssc 
072 7 |a TEC027000  |2 bisacsh 
082 0 4 |a 620.5  |2 23 
100 1 |a Zhang, Xiao-Sheng.  |e author. 
245 1 0 |a Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting  |h [electronic resource] /  |c by Xiao-Sheng Zhang. 
264 1 |a Berlin, Heidelberg :  |b Springer Berlin Heidelberg :  |b Imprint: Springer,  |c 2016. 
300 |a XX, 122 p. 95 illus., 76 illus. in color.  |b online resource. 
336 |a text  |b txt  |2 rdacontent 
337 |a computer  |b c  |2 rdamedia 
338 |a online resource  |b cr  |2 rdacarrier 
347 |a text file  |b PDF  |2 rda 
490 1 |a Springer Theses, Recognizing Outstanding Ph.D. Research,  |x 2190-5053 
520 |a This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental measurements, mechanism analyses, theoretical simulations and so on. Three common materials (i.e., silicon, PDMS and Parylene-C) with micro/nano hierarchical structures have been successfully fabricated, which also show several attractive properties. Furthermore, this book introduces this fabrication technology into microenergy field, and proposes several high-performance nanogenerators, of which practical applications have also been studied in commercial electronic device and biomedical microsystem. 
650 0 |a Engineering. 
650 0 |a Energy harvesting. 
650 0 |a Biotechnology. 
650 0 |a Nanotechnology. 
650 0 |a Electronics. 
650 0 |a Microelectronics. 
650 1 4 |a Engineering. 
650 2 4 |a Nanotechnology and Microengineering. 
650 2 4 |a Microengineering. 
650 2 4 |a Energy Harvesting. 
650 2 4 |a Electronics and Microelectronics, Instrumentation. 
650 2 4 |a Nanotechnology. 
710 2 |a SpringerLink (Online service) 
773 0 |t Springer eBooks 
776 0 8 |i Printed edition:  |z 9783662488140 
830 0 |a Springer Theses, Recognizing Outstanding Ph.D. Research,  |x 2190-5053 
856 4 0 |u http://dx.doi.org/10.1007/978-3-662-48816-4  |z Full Text via HEAL-Link 
912 |a ZDB-2-ENG 
950 |a Engineering (Springer-11647)