Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting
This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental...
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| Format: | Electronic eBook |
| Language: | English |
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Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer,
2016.
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| Series: | Springer Theses, Recognizing Outstanding Ph.D. Research,
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| Online Access: | Full Text via HEAL-Link |
