Historical Evolution Toward Achieving Ultrahigh Vacuum in JEOL Electron Microscopes

• Main Author: Yoshimura, Nagamitsu (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Tokyo : Springer Japan : Imprint: Springer, 2014.
• Series: SpringerBriefs in Applied Sciences and Technology,
• Subjects: Physics.; Physical measurements.; Measurement.; Spectroscopy.; Microscopy.; Machinery.; Nanotechnology.; Spectroscopy and Microscopy.; Nanotechnology and Microengineering.; Machinery and Machine Elements.; Measurement Science and Instrumentation.

This book describes the developmental history of the vacuum system of the transmission electron microscope (TEM) at the Japan Electron Optics Laboratory (JEOL) from its inception to its use in today’s high-technology microscopes. The author and his colleagues were engaged in developing vacuum techno...