Reliability of High Mobility SiGe Channel MOSFETs for Future CMOS Applications

• Main Authors: Franco, Jacopo (Author), Kaczer, Ben (Author), Groeseneken, Guido (Author)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Dordrecht : Springer Netherlands : Imprint: Springer, 2014.
• Series: Springer Series in Advanced Microelectronics, 47
• Subjects: Physics.; Semiconductors.; Electronic circuits.; Optical materials.; Electronic materials.; Circuits and Systems.; Optical and Electronic Materials.; Electronic Circuits and Devices.

Due to the ever increasing electric fields in scaled CMOS devices, reliability is becoming a showstopper for further scaled technology nodes. Although several groups have already demonstrated functional Si channel devices with aggressively scaled Equivalent Oxide Thickness (EOT) down to 5Å, a 10 yea...