Micro Electro Mechanical Systems

• Συγγραφή απο Οργανισμό/Αρχή: SpringerLink (Online service)
• Άλλοι συγγραφείς: Huang, Qing-An (Επιμελητής έκδοσης, http://id.loc.gov/vocabulary/relators/edt)
• Μορφή: Ηλεκτρονική πηγή Ηλ. βιβλίο
• Γλώσσα: English
• Έκδοση: Singapore : Springer Singapore : Imprint: Springer, 2018.
• Έκδοση: 1st ed. 2018.
• Σειρά: Micro/Nano Technologies,
• Θέματα: Mechatronics.; Nanotechnology.; Electronics.; Microelectronics.; Microwaves.; Optical engineering.; Nanotechnology and Microengineering.; Electronics and Microelectronics, Instrumentation.; Microwaves, RF and Optical Engineering.

This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, po...