Micro Electro Mechanical Systems

• Corporate Author: SpringerLink (Online service)
• Other Authors: Huang, Qing-An (Editor, http://id.loc.gov/vocabulary/relators/edt)
• Format: Electronic eBook
• Language: English
• Published: Singapore : Springer Singapore : Imprint: Springer, 2018.
• Edition: 1st ed. 2018.
• Series: Micro/Nano Technologies,
• Subjects: Mechatronics.; Nanotechnology.; Electronics.; Microelectronics.; Microwaves.; Optical engineering.; Nanotechnology and Microengineering.; Electronics and Microelectronics, Instrumentation.; Microwaves, RF and Optical Engineering.

This handbook volume aims to provide a comprehensive, self-contained, and authoritative reference in MEMS. It covers the theoretical and practical aspects including but not limited to sensors, actuators, RF MEMS, micro fluids and bio MEMS systems. It is particularly recommended to undergraduates, po...

Table of Contents:

• Device Physics
• Scaling effect
• Sensors
• Actuators
• RF MEMS
• Micro fluid and bio MEMS
• Integration techniques
• Micro systems.