Laser Heat-Mode Lithography Principle and Methods /

• Main Author: Wei, Jingsong (Author, http://id.loc.gov/vocabulary/relators/aut)
• Corporate Author: SpringerLink (Online service)
• Format: Electronic eBook
• Language: English
• Published: Singapore : Springer Singapore : Imprint: Springer, 2019.
• Edition: 1st ed. 2019.
• Series: Springer Series in Materials Science, 291
• Subjects: Surfaces (Physics).; Interfaces (Physical sciences).; Thin films.; Lasers.; Photonics.; Microwaves.; Optical engineering.; Optical materials.; Electronic materials.; Surface and Interface Science, Thin Films.; Optics, Lasers, Photonics, Optical Devices.; Microwaves, RF and Optical Engineering.; Optical and Electronic Materials.

This book provides a systematic description and analysis of laser heat-mode lithography, addressing the basic principles, lithography system, manipulation of feature size, grayscale lithography, resist thin films, and pattern transfer, while also presenting typical experimental results and applicati...